Semistat Prozessthermostate
Thermo-electric process thermostats for the semiconductor industry from -20 to 90 °C

Thermoelectric process thermostats from –20 to 90 °C for the semiconductor industry

Fast and precise temperature control for complex processes. Based on the tried-and-tested principles of heat transfer used for Peltier elements, the LAUDA Semistat thermoelectric systems for temperature control offer reproducible temperature control for plasma etching applications.

The dynamic temperature control of the electrostatic wafer chuck (ESC) makes it possible to use devices with all types of etching processes.

Energy-efficient and space-saving, with stable temperature control, these clever systems are perfect for manufacturing ever-smaller components.


Benefits and added value

  • Compressor and refrigerant-free system with low energy consumption
  • Smallest footprint in the industry, ideally suited for underfloor installation
  • Extremely low volume of heat transfer fluid

Working range

Point of use (POU) temperature control systems can reduce energy consumption by up to 90 % compared to compressor-based systems. Minimal space requirements with the option of underfloor installation at the point of use minimizes cleanroom use. Quick and precise temperature control of the process temperature profiles to ±0.1 °C improves wafer-to-wafer homogeneity.

Min. working temperature

-20 °C

Max. working temperature

90 °C

Temperature stability

0.1 ± K

Product lines

Select up to 4 technical parameters that you want to display in the table

Product Min. working temp Max. working temp Heater power max. Cooling output at 20 °C 50 Hz Compare product
Semistat S 1200 -20 °C 90 °C 3 kW 1.2 kW Details
Semistat S 2400 -20 °C 90 °C 6 kW 2.45 kW Details
Semistat S 4400 -20 °C 90 °C 12 kW 4.4 kW Details

Device dimensions

116 x 232 x 470 mm

Semistat S 1200

194 x 300 x 560 mm

Semistat S 4400

116 x 300 x 560 mm

Semistat S 2400

Downloads - general product data

Please select which documents you would like to see in which language:

Available documents
Available languages
Device Device category Document type Language Format File size

Thermoelectric process thermostats

Process thermostats Operating instructions
PDF 2,41 MB Download document

Chapter Circulation and process thermostats
Overall brochure

Process thermostats Brochure
PDF 4,76 MB Download document

Thermoelectric process thermostats

Process thermostats Brochure
PDF 864,69 kB Download document


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+49 9343 503-555

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Heating thermostats

  • Various performance classes from entry-level to high-end
  • Temperature range 20 °C to 300 °C
  • Temperature stability ± 0.01 K
  • Bath sizes from 2.5 L to 40 L, bath vessels of stainless steel (insulated)
  • Various interface modules
To Heating thermostats

Cooling thermostats

  • Various performance classes from entry-level to high-end
  • Temperature range -100 °C to 200 °C
  • Simply sustainable - can be used with natural refrigerants
  • Bath sizes from 3.3 L to 44 L, bath vessels of stainless steel (insulated)
  • Various interface modules
To Cooling thermostats

Circulation and process thermostats

  • Temperature control thanks to refrigerants or Peltier technology
  • Devices with open bath systems and with pressure overlays
  • Compact design
  • Temperature range -90 °C to 320 °C
  • Cooling output 0.06 to 25 kW
To Circulation and process thermostats

Calibration thermostats

  • Temperature range -25 °C to 200 °C
  • Constant immersion depth thanks to a calibration chamber with overflow principle
  • Various sizes, bath openings and usable depths available
  • Extensive range of accessories
  • Better heat transfer as compared to heating cabinets and metal block thermostats
To Calibration thermostats

Immersion and bridge thermostats

  • Temperature control for any bath vessels, heating output up to 3.5 kW
  • Telescoping rod for baths from 310 to 550 mm width
  • With various pump models: Pressure-suction pump or high-performance pressure pumps
  • For different bath depths up to 320 mm
  • Selectable control head depending on the required functional scope
To Immersion and bridge thermostats

Applications and industry examples for LAUDA thermostats

Semiconductor industry

In the production of semiconductors and testing of electronic components, there are numerous processes whose temperature must be controlled precisely.

To the application example

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