Semistat S 2400

Point of use (POU) temperature control systems can reduce energy consumption by up to 90 % compared to compressor-based systems. Minimal space requirements with the option of underfloor installation at the point of use minimizes cleanroom use. Quick and precise temperature control of the process temperature profiles to ±0.1 °C improves wafer-to-wafer homogeneity.

Part no. : L003277
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Circulation and process thermostats Semistat S 2400
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Back to overview Circulation and process thermostats

Features

Thermoelectric process thermostat with low energy consumption
Quiet and low vibration level operation due to refrigerant free cooling technology
No filters or DI components required
With a connection to purge with clean dry air (CDA) to prevent condensation
Use of perfuorinated fluids
Water cooled system
Compact overall size and low weight
Extremely low volume of heat transfer liquid
SEMI S2 and F47 compliant

Working range

Min. working temperature

Min. working temperature

-20 °C

Max. working temperature

Max. working temperature

90 °C

Temperature stability

Temperature stability

0.1 ± K

Technical data (according to DIN 12876)

Working temperature range
-20 ... 90 °C
Temperature stability
0.1 ± K
Heater power min.
6 kW
Min. filling volume
1.25 L
Max. filling volume
1.6 L
Dimensions (WxDxH)
116 x 300 x 560 mm
Weight
27 kg
Net weight
26.81 kg
Power supply
Connection to PSC
TemperatureCooling capacity 50 HzCooling capacity 60 Hz
20 °C2.45 kW2.45 kW
10 °C1.93 kW1.93 kW
0 °C1.4 kW1.4 kW
-10 °C0.88 kW0.88 kW
-20 °C0.35 kW0.35 kW
Download Data sheet Semistat S 2400
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Accessories

Filling canister
Filling canister
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