Semistat S 4400

Point of use (POU) temperature control systems can reduce energy consumption by up to 90 % compared to compressor-based systems. Minimal space requirements with the option of underfloor installation at the point of use minimizes cleanroom use. Quick and precise temperature control of the process temperature profiles to ±0.1 °C improves wafer-to-wafer homogeneity.

Order no.: L003278

Features

Thermoelectric process thermostat with low energy consumption
Quiet and low vibration level operation due to refrigerant free cooling technology
No filters or DI components required
With a connection to purge with clean dry air (CDA) to prevent condensation
Use of perfuorinated fluids
Water cooled system
Compact overall size and low weight
Extremely low volume of heat transfer liquid

Working range

Min. working temperature

-20 °C

Max. working temperature

90 °C

Temperature stability

0.1 ± K

Technical data (according to DIN 12876)

Working temperature range
-20 ... 90 °C
Temperature stability
0.1 ± K
Heater power min.
12 kW
Min. filling volume
2.5 L
Max. filling volume
2.8 L
Dimensions (WxDxH)
194 x 300 x 560 mm
Power supply
Connection to PSC
TemperaturKälteleistung 50 HzKälteleistung 60 Hz
20 °C4,4 kW4,4 kW
10 °C3,5 kW3,5 kW
0 °C2,6 kW2,6 kW
-10 °C1,65 kW1,65 kW
-20 °C0,7 kW0,7 kW

 

Downloads - general product data

Please select which documents you would like to see in which language:

Available documents
Available languages
Device Device category Document type Language Format File size

Chapter Circulation and process thermostats
Overall brochure

Process thermostats Brochure
English
PDF 4,76 MB Download document

Thermoelectric process thermostats

Process thermostats Brochure
English
PDF 864,69 kB Download document

Thermoelectric process thermostats

Process thermostats Operating instructions
English
PDF 2,41 MB Download document

Accessories

There are already three products on your comparison list.
To compare other products, please delete one of the products on your comparison list.