FILL CANISTER 1 GAL
Point of use (POU) temperature control systems can reduce energy consumption by up to 90 % compared to compressor-based systems. Minimal space requirements with the option of underfloor installation at the point of use minimizes cleanroom use. Quick and precise temperature control of the process temperature profiles to ±0.1 °C improves wafer-to-wafer homogeneity.
Working temperature min.
-20 °C
Max. working temperature
90 °C
Temperature stability
0.1 ± K
Temperature | Cooling capacity 50 Hz | Cooling capacity 60 Hz |
---|---|---|
20 °C | 4.4 kW | 4.4 kW |
10 °C | 3.5 kW | 3.5 kW |
0 °C | 2.6 kW | 2.6 kW |
-10 °C | 1.65 kW | 1.65 kW |
-20 °C | 0.7 kW | 0.7 kW |
20 °C | 4.4 kW | 4.4 kW |
10 °C | 3.5 kW | 3.5 kW |
0 °C | 2.6 kW | 2.6 kW |
-10 °C | 1.65 kW | 1.65 kW |
-20 °C | 0.7 kW | 0.7 kW |
Device | Device category | Document type | Language | Format | File size | |
---|---|---|---|---|---|---|
Chapter Circulation and process thermostats Overall brochure | Process thermostats | Brochure |
English
| 4,84 MB | Download document | |
Thermoelectric process thermostats | Process thermostats | Brochure |
English
| 864,69 kB | Download document | |
Thermoelectric process thermostats | Process thermostats | Operating instruction |
English
| 2,41 MB | Download document |
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