Semistat S 1200

Point of use (POU) temperature control systems can reduce energy consumption by up to 90 % compared to compressor-based systems. Minimal space requirements with the option of underfloor installation at the point of use minimizes cleanroom use. Quick and precise temperature control of the process temperature profiles to ±0.1 °C improves wafer-to-wafer homogeneity.

Order no. : L003276
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Circulation and process thermostats Semistat S 1200
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Back to overview Circulation and process thermostats

Features

Thermoelectric process thermostat with low energy consumption
Quiet and low vibration level operation due to refrigerant free cooling technology
No filters or DI components required
With a connection to purge with clean dry air (CDA) to prevent condensation
Use of perfuorinated fluids
Water cooled system
Compact overall size and low weight
Extremely low volume of heat transfer liquid
SEMI S2 and F47 compliant

Working range

Min. working temperature

-20 °C

Max. working temperature

90 °C

Temperature stability

0.1 ± K

Technical data (according to DIN 12876)

Working temperature range
-20 ... 90 °C
Temperature stability
0.1 ± K
Heater power min.
3 kW
Min. filling volume
1 L
Max. filling volume
1.3 L
Dimensions (WxDxH)
116 x 232 x 470 mm
Weight
15 kg
Power supply
Connection to PSC
TemperatureCooling capacity 50 HzCooling capacity 60 Hz
20 °C1.2 kW1.2 kW
10 °C0.9 kW0.9 kW
0 °C0.6 kW0.6 kW
-10 °C0.35 kW0.35 kW
-20 °C0.08 kW0.08 kW
20 °C1.2 kW1.2 kW
10 °C0.9 kW0.9 kW
0 °C0.6 kW0.6 kW
-10 °C0.35 kW0.35 kW
-20 °C0.08 kW0.08 kW
Download Data sheet Semistat S 1200

Downloads - general product data

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Available documents
Available languages
DeviceDevice categoryDocument typeLanguageFormatFile size
Chapter Circulation and process thermostats
Overall brochure 		Process thermostats Brochure
English
PDF 4,84 MB Download document Download document
Thermoelectric process thermostats Process thermostats Brochure
English
PDF 864,69 kB Download document Download document
Thermoelectric process thermostats Process thermostats Operating instruction
English
PDF 2,41 MB Download document Download document

Accessories

FILL CANISTER 1 GAL
FILL CANISTER 3 GAL
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