The LAUDA DR. R. WOBSER GmbH & Co. KG, the world market leader for precise temperature control, has renewed its support for the Saxon technology start-up watttron. Together with other renowned investors, LAUDA is providing fresh capital of EUR 3.4 million in addition to expertise. LAUDA is thus underlining the importance of the successful cooperation with the young company from Freital near Dresden, which began in 2018. The multi-award-winning start-up company develops and manufactures intelligent heating systems that are able to heat with pinpoint accuracy. This is particularly important in the packaging industry, as the innovative process can save energy and material. Together with LAUDA, marketing opportunities in the fields of analysis, bio and laboratory technology and on the North American market are being worked on. In addition, both companies are working on a prototype that is not only capable of heating with pixel accuracy, but also of cooling.

With the current financing round, watttron aims to accelerate its own development, gain new partners on a global level and open up new industries such as biotechnology, chemistry or 3D electronics. LAUDA as a partner firmly believes in the success of the young company and is convinced of the joint partnership: »We have been watttron's cooperation partner for around two years because we have already seen and actively support the benefits of the patented heating technology beyond the packaging market in 2018«, says Dr. Gunther Wobser, President and CEO of LAUDA. »The positive development of recent years has confirmed our decision to continue investing in watttron.«

Thermoelectric process thermostats, which are used in the temperature control of etching processes in the semiconductor industry, have been a permanent feature of LAUDA’s comprehensive portfolio since its acquisition by Noah Precision (now LAUDA-Noah) in 2014. Now the global market leader has fully revised and expanded the former POU product line with the new “Semistat” series.

The new LAUDA Semistat product line comprises three models: LAUDA's Semistat S 1200 is an affordable entry-level device that offers an even smaller footprint than its predecessor – with the same cooling output of 1.2 kW at 20°C. Meanwhile, the newly developed Semistat S 2400 retains the mechanical and hydraulic structure of the product line. The process thermostat also incorporates the latest innovations from the thermoelectrics sector, such as the latest generation of high-performance Peltier elements, which guarantees a higher power density and greater reliability. With the Semistat 4400, LAUDA has brought a whole new performance class with 4.4 kW cooling output to market. This process thermostat is specially designed for applications using 300 mm wafers with a high cooling output requirement at low temperatures.

Thermoelectric process thermostats for the semiconductor industry from -20 to 90 °C

Semistat process thermostats have been optimized for precision temperature control in plasma etching applications in the semiconductor industry. Defined areas are removed from the surface of the wafers during the etching process. A dynamic temperature controller keeps the wafer chucks located inside the plasma etching chamber at a constant temperature, to prevent temperature drift. The constant temperature is crucial in maintaining a stable etching profile and producing a high-quality surface. Peltier technology realizes the two main advantages of Semistat thermostats: energy and space savings combined with maximum long-term operational stability.

The new process thermostats are extremely energy-efficient because they only control the temperature and consume energy when there is a need to regulate the temperature inside the etching chamber. Since the Peltier element is the only component used for heating and cooling, it is possible to minimize the space requirements of the thermostat. The compact design and optional underfloor installation ensure that minimal space is occupied in the cost-intensive cleanroom. A small internal fluid volume and short hose connections from the device to the application mean that less energy is required to control the fluid temperature. The low volume of the temperature control fluid, in particular, allows rapid temperature changes. Semistat temperature control systems use up to 90 percent less energy than compressor-based systems.

Like its established predecessor, the Semitat product line has a working temperature range of -20 to 90°C and offers a high temperature stability of ±0.1 K. With cooling outputs from 1.2 to 4.4 kW, the water-cooled devices can be used in combination with a large variety of chamber and platform models.

The most important functions of LAUDA Semistat process thermostats

• Compressor and refrigerant-free system with low energy consumption
• Smallest footprint in the industry
• Extremely low volume of heat transfer fluid
• Use of perfluorinated fluids
• Improved accessibility and minimal cleanroom use
• No filters or DI components required
• High reliability and low operating costs
• Locally exchangeable modules for easy troubleshooting
• Dynamic, stable temperature control at the point of use
• Temperature drift prevention for stable etching profiles
• Improved wafer-to-wafer stability

The global situation regarding the coronavirus has changed dramatically and has reached unexpected proportions. Today, we have once again defined important measures within the company that also have an impact on our business operations. We have drawn up a plan that will keep our business operations going for as long as possible. However, there may be certain restrictions on accessibility.

We have decided that from 17 March 2020, all business trips from Germany to other countries will be prohibited. In addition, we will not receive any business visits from abroad from 17 March until further notice. We ask for your understanding. It is important to us to emphasize that the health of our employees is always our top priority.

Furthermore, we try to conduct our business in such a way that our customers are affected as little as possible. However, certain effects cannot be avoided due to the epidemic. We thank you for your understanding and are available to answer your questions.